InfiniteFocus

Highly accurate, fast and flexible optical 3D measurements

Users benefit from a 3D micro coordinate measurement machine and surface roughness measurement device combined in one system. Users achieve traceable measurement results in a high repeatability and a vertical resolution of up to 10nm. The robust measurement principle of Focus-Variation in combination with a vibration-isolating hardware enables the form and roughness measurement of also large and heavy components. All axes of InfiniteFocus are equipped with highly accurate encoders ensuring precise stage movement. With an automation interface, InfiniteFocus is also applied for fully automatic measurement in production.

Technical Specifications

Measurement principle non-contact, optical, three-dimensional, based on Focus-Variation
Positioning volume (X x Y x Z) 100 mm x 100 mm x 100 mm = 1000000 mm3 (optional: 200 mm x 200 mm x 100 mm = 4000000 mm³)
Objective magnification   2.5x 5x 10x HX 10x 20x HX 20x 50x 100x
Working distance mm 8.8 23.5 37 17.5 30 19 11 4.5
Lateral measurement range (X,Y)
(X x Y)
mm
mm²
5.63
31.7
2.82
7.85
1.62
2.62
1.62
2.62
0.7
0.49
0.81
0.66
0.32
0.10
0.16
0.03
Vertical resolution nm 2300 410 250 100 80 50 20 10
Height step accuracy (1 mm) % n.a. 0.05 0.05 0.05 0.05 0.05 0.05 0.05
Max. measurable area Optional
mm²
mm²
10000
40000
10000
40000
10000
40000
10000
40000
10000
24780
10000
24780
3965
3965
990
990
Min. measurable roughness (Ra) µm 7 1.2 0.75 0.3 0.24 0.15 0.06 0.03
Min. measurable roughness (Sa) µm 3.5 0.6 0.375 0.15 0.12 0.075 0.03 0.015
Min. measurable radius µm 20 10 5 5 3 3 2 1

All the technical specifications can be found in the product info.

High measuring point density

Up to 500 million measurement points ensure a meticulously detailed measurement with tolerances in the μm and sub-μm range along with large working distance. The high measurement point density of Focus-Variation enables operators to gain a consistently high lateral and vertical resolution across high measurement volumes.

 

Measurement of steep flanks

Light coming from different directions is used to positively influence a measurement. The measurement of the maximum flank angle is not restricted by the numerical aperture of an objective. Depending on the surface users measure surfaces with slope angles up to 87°.

 

Full form measurement with Real3D

Using Real3D, users measure surfaces from numerous perspectives. Single measurements are automatically merged into a full 3D dataset. High-precision and calibrated rotation and tilt axes ensure automated, repeatable and traceable measurement on the whole measurement object.

 

Focus-Variation Technology

Alicona measurement systems are based on the technology of Focus-Variation and combine the functionalities of a surface roughness measurement device and a form measurement system. Each Alicona measurement instrument is a surface measurement device, surface roughness measurement system, 3D measurement system for geometrical tolerancing and micro coordinate measurement system. The Focus-Variation technology combines the small depth of focus of an optical system with vertical scanning to provide topographical and color information from the variation of focus. The main component of the system is a precision optics containing various lens systems that can be equipped with different objectives, allowing measurements with different resolution.