Optical measurement sensor for automated form & roughness measurement on the shop floor
The optical measurement sensor IF-SensorR25 is integrated into a production line and delivers high resolution, repeatable and traceable results when measuring surface characteristics in the μm or sub-μm range. Therefore, the IF-SensorR25 is a platform that enables the use of the same measurement process both in-line and in ameasurement laboratory.
Technical specifications
Measurement principle | non-contact, optical, three-dimensional, based on Focus-Variation | |
Positioning volume (Z) | 25 mm (mot.) | |
Objective magnification | 10x | 20x | 50x | 2xSX | 4xAX* | 5xAX | 10x AX | 20xAX | 50xSX | ||
Working distance | mm | 17.5 | 16 | 10.1 | 34 | 30 | 34 | 33.5 | 20 | 13 | |
Lateral measurement range (X,Y) | mm | 2 | 1 | 0.4 | 10 | 4.87 | 3.61 | 2 | 1 | 0.4 | |
(X x Y) | mm² | 4 | 1 | 0.16 | 100 | 23.72 | 13.03 | 4 | 1 | 0.16 | |
Vertical resolution | nm | 100 | 50 | 20 | 3500 | 620 | 460 | 130 | 70 | 45 | |
Height step accuracy (1 mm) | % | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | |
Min. measurable roughness (Ra) | µm | 0.3 | 0.15 | 0.08 | --- | --- | --- | 0.45 | 0.25 | 0.15 | |
Min. measurable roughness (Sa) | µm | 0.15 | 0.075 | 0.05 | --- | --- | --- | 0.25 | 0.1 | 0.08 | |
Min. measurable radius | µm | 5 | 3 | 2 | 20 | 12 | 10 | 5 | 3 | 2 | |